Torvac - Vacuum Pumping

From Atmosphere to UHV

From pumping harsh chemicals in an industrial environment to detailed surface analysis in a clean ultra–high vacuum chamber, Torvac will supply you the correct pump for your application.

Gamma Vacuum (Ion pumping)

Ebara Technologies

Torvac features new turbo and roughing pump systems for every application

	We also now offer complete turbo pump systems with either dry backing pumps or rotary vane. All systems are factory warranted for one year. Service available worldwide.
Torvac provides complete rotary vane pumps, blowers, and pump blower combination packages. We supply rotary vane pumps from 1.5 cfm to 55 cfm. Rotary Vane/Blower combinations can be tailored for up to 1000 cfm.

go to Ion Pumps by Gamma Vacuum, Inc.

Gamma Vacuum acquired the ion pumping and controller technology from Physical Electronics(formally Perkin-Elmer) in May of 2003. The rich history of innovation in the Ultra High Vacuum environment continues through the expertise within Gamma Vacuum with over 130 years of combined experience in the Ion Pump and Ultra High Vacuum industry.

Gamma Vacuum manufactures the finest line of Ion pumping products in the world. These pumps offer the highest pumping speed for their compact size.

The Digitel™ Multiple Pump Controller (MPCe)
Complete, intelligent control.

Full LCD touchscreen, Controls, monitors and protects 2 pumps, TSP control built in, 5600-700VDC output. The world's most reliable ion pump controller for pumps from 80 l/s to 1000 l/s.

Gamma Vacuum offers ion pumps and control for ion pumps from 2 liters per second to 800 l/s standard. We also supply titanium sublimation pumping in combination with ion pumps or as a standalone offering.

New To Torvac!

go to Ebara Technologies, Inc. Ebara further compliments our growing line of the highest quality vacuum equipment with their rugged semiconductor grade roughing pumps and High to Ultra High Vacuum Magnetically Levitated Turbomolecular pumps.

Roughing Pumps: EBARA's dry pumps survive the harshest applications such as LPCVD, PECVD, CVD, and metal etch. EBARA's dry pumps are used for many applications in and outside the semiconductor industry where oil backstreaming is unacceptable.

Turbo Pumps: EBARA's turbomolecular pumps offer full magnetic levitation, which provides for a clean, reliable vacuum for today's high technology environments. The ET Series features a five axis magnetic bearing and tuning free half rack controllers.